Title:
PROCESSING SYSTEM AND PROCESSING PROCESS FOR MICROLENS ARRAY
Document Type and Number:
WIPO Patent Application WO/2020/132947
Kind Code:
A1
Abstract:
A processing system and processing process for a microlens array, the processing system comprising a laser light source (10), a shutter (20), a half-wave plate (30), a Glan prism (40), a polarizing plate (50), a diaphragm (51), a plano-concave mirror (60), a first plano-convex mirror (70), first mirrors (81, 82, 83), a spatial light modulator (90), a second plano-convex mirror (100), a third plano-convex mirror (110), a dichroic mirror (120), an image sensor (130), an objective lens (140), and a displacement platform (150). The spatial light modulator (90) is used to shape and split a laser beam provided by the laser light source (10), and a plurality of shaped laser beams may be formed, which effectively overcomes the shortcomings of traditional single-beam laser processing manners having low efficiency. At the same time, by means of the parallel processing of the plurality of shaped laser beams, a crater array may be ablated on a surface of an ordinary glass slide, effectively simplifying the process flow of processing the microlens array, which thus reduces production costs.
Inventors:
LIAO CHANGRUI (CN)
WANG YIPING (CN)
ZHOU PENG (CN)
WANG YIPING (CN)
ZHOU PENG (CN)
Application Number:
PCT/CN2018/123906
Publication Date:
July 02, 2020
Filing Date:
December 26, 2018
Export Citation:
Assignee:
UNIV SHENZHEN (CN)
International Classes:
G02B3/00; G02B27/09; G02B27/10
Foreign References:
| CN108362394A | 2018-08-03 | |||
| CN102757014A | 2012-10-31 | |||
| CN103286453A | 2013-09-11 | |||
| CN101349871A | 2009-01-21 | |||
| CN207557645U | 2018-06-29 | |||
| US20120257037A1 | 2012-10-11 |
Other References:
SU, YA-HUI: "Uniformity of Multi-foci for Holographic Femtosecond Laser Parallel Fabrication", OPTICS AND PRECISION ENGINEERING, vol. 21, no. 8, 31 August 2013 (2013-08-31)
Attorney, Agent or Firm:
HENSEN INTELLECTUAL PROPERTY FIRM (CN)
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