PRODUCTION DEVICE FOR CARBON NANOTUBES AND SUPPLY UNIT TO BECOME ONE PART OF SAID PRODUCTION DEVICE, AND PRODUCTION METHOD FOR CARBON NANOTUBES

WIPO Patent Application WO/2015/030145

A1

As a means for increasing the yield of carbon nanotubes produced by gas-phase catalysis, provided is a production device (10) for producing carbon nanotubes by gas-phase catalysis that is characterized by being provided with: a first chamber (14) that has a growth region that is a region where carbon nanotubes are formed; first temperature adjustment devices (16, 18) that can adjust the temperature of the growth region inside the first chamber (14); pressure adjustment devices (23, 24) that can adjust the pressure inside the first chamber (14); a first supply device (30) that can supply a carbon source to the growth region inside the first chamber (14); and a first vaporization device (including a heater (31B)) that can vaporize a fluid (L) that is disposed inside the production device (10). The production device is also characterized in that the first vaporization device (which includes the heater (31B)) can vaporize the fluid (L) such that at least one type of gas-phase catalyst that is formed from an iron-group-element-containing substance and a halogen-containing substance that are contained in the fluid (L) is supplied to the growth region inside the first chamber (14).

INOUE YOKU (JP)
NAKANO TAKAYUKI (JP)
NAKANISHI TAUTO (JP)

PCT/JP2014/072652

March 05, 2015

August 28, 2014

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UNIV SHIZUOKA NAT UNIV CORP (JP)
JNC CORP (JP)

C01B31/02

WO2009107603A1

2009-09-03

MUSSO, S. ET AL.: "Growth of vertically aligned carbon nanotubes by CVD by evaporation of carbon precursors", DIAMOND & RELATED MATERIALS, vol. 14, 2005, pages 784 - 789
"Kagaku Daijiten Henshu Iinkai", KAGAKU DAIJITEN 1, 1979, pages 1050 - 1051

OKUBO, KATSUYUKI (JP)
Katsuyuki Okubo (JP)

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