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Title:
PRODUCTION DEVICE FOR MAGNESIUM DIBORIDE SUPERCONDUCTIVE THIN FILM WIRE MATERIAL
Document Type and Number:
WIPO Patent Application WO/2019/150674
Kind Code:
A1
Abstract:
The objective of the present invention is to provide a production device for an MgB2 superconductive thin film wire material enabling a reduction in the cost of a long wire material. The production device for the superconductive thin film wire material according to the present invention is a production device for a superconductive thin film wire material having an MgB2 thin film formed over a long base material, and comprises a long base material travel mechanism, an MgB2 thin film forming mechanism, and an atmosphere control mechanism. The MgB2 thin film forming mechanism comprises a magnetron sputter mechanism using a mixed raw material target wherein Mg and B have been mixed, and a base material heating member disposed facing the mixed raw material target, for heating the long base material. As observed from the travel direction of the long base material, the cross-sectional shape of the base material heating member has a concave shape comprising a bottom surface wall that is parallel to the surface of the mixed raw material target, and two side-surface walls positioned at two ends in the width direction of the bottom surface wall and protruding towards the mixed raw material target. The long base material travel mechanism is constituted in such a manner that the long base material travels with a predetermined positional relationship inside a space enclosed by the two side surface walls and the bottom surface wall of the base material heating member, and the surface of the mixed raw material target.

Inventors:
KUSUNOKI Toshiaki (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
IWANAKA Takumu (6-6, Marunouchi 1-chome, Chiyoda-k, Tokyo 80, 〒1008280, JP)
Application Number:
JP2018/039529
Publication Date:
August 08, 2019
Filing Date:
October 24, 2018
Export Citation:
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Assignee:
HITACHI, LTD. (6-6 Marunouchi 1-chome, Chiyoda-ku Tokyo, 80, 〒1008280, JP)
International Classes:
H01B13/00; C23C14/06; H01L39/24
Foreign References:
JP2001348663A2001-12-18
JPH0517869A1993-01-26
Attorney, Agent or Firm:
POLAIRE I.P.C. (13-11, Nihonbashikayabacho 2-chome Chuo-k, Tokyo 25, 〒1030025, JP)
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