Title:
PRODUCTION DEVICE AND PRODUCTION METHOD OF THIN FILM
Document Type and Number:
WIPO Patent Application WO/2010/116697
Kind Code:
A1
Abstract:
Provided is production device of thin film wherein cracking damage of a crucible can be prevented by tilting the crucible while maintaining the molten state of a film formation material in the crucible, thereby almost totally discharging the film formation material from the crucible. Production device of thin film comprises a film formation source (9) having a receiving section provided with an upper opening in order to hold a film formation material (3), an electron gun (5) which forms melt by irradiating the film formation material in the receiving section with an electron beam (6) thereby melting the film formation material, and also evaporates the film formation material, a tilting mechanism (8) which discharges the melt from the storage section by tilting the film formation source (9) from the posture at the time of film formation to the tilt posture where the melt cannot be held in the receiving section, a vacuum chamber (22) which houses the film formation source and the tilting mechanism and forms a thin film internally on a substrate, and a vacuum pump(34) which exhausts air in the vacuum chamber, wherein the locus of tilting the film formation source (9) or the orbit of the electron beam (6) is controlled in such a manner that the melt in the storage section is continuously irradiated with the electron beam (6) while the film formation source (9) is tilted from the posture at the time of film formation to the tilt posture.
Inventors:
HONDA, Kazuyoshi (())
本田和義 (())
YANAGI, Tomofumi (())
柳智文 (())
SHINOKAWA, Yasuharu (())
本田和義 (())
YANAGI, Tomofumi (())
柳智文 (())
SHINOKAWA, Yasuharu (())
Application Number:
JP2010/002445
Publication Date:
October 14, 2010
Filing Date:
April 02, 2010
Export Citation:
Assignee:
PANASONIC CORPORATION (1006, Oaza Kadoma Kadoma-sh, Osaka 01, 〒5718501, JP)
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
HONDA, Kazuyoshi (())
本田和義 (())
YANAGI, Tomofumi (())
柳智文 (())
パナソニック株式会社 (〒01 大阪府門真市大字門真１００６番地 Osaka, 〒5718501, JP)
HONDA, Kazuyoshi (())
本田和義 (())
YANAGI, Tomofumi (())
柳智文 (())
International Classes:
C23C14/24; C23C14/14; C23C14/30; F27B14/04; F27B14/10; F27B14/14; F27B14/18; F27D11/08
Attorney, Agent or Firm:
PATENT CORPORATE BODY ARCO PATENT OFFICE (3rd Fl, Bo-eki Bldg. 123-1, Higashimachi, Chuo-ku, Kobe-sh, Hyogo 31, 〒6500031, JP)
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