Title:
PRODUCTION DEVICE FOR MULTIPLE-SYSTEM FILM AND COATING TOOL FOR MULTIPLE-SYSTEM FILM
Document Type and Number:
WIPO Patent Application WO/2005/001153
Kind Code:
A1
Abstract:
A production device and method which produce a multiple-system film having metal components such as TiAlN greatly different in melting point by a melting-evaporation type ion plating method that provides a high material utilization efficiency and a good film quality. Power needed to evaporate a material (4) is first supplied, and then power gradually increased over the initail power is repeatedly supplied until a needed maximum power is reached. Concurrently, a plasma control is performed for converging plasma (7) onto an initial area needed to evaporate the material, and then a plasma control is performed for continuously and sequentially moving/expanding plasma from the initial plasma area up to a maximum plasma area to thereby gradually melt the non-melted portion of the material.
Inventors:
Sato, Hideki (11-17, Higashiishiganemachi Toyama-shi, Toyama 64, 93009, JP)
Kitajima, Kazuo (149-1, Yamamuro Toyama-shi, Toyama 06, 93980, JP)
Sonobe, Masaru (283-5, Takehana Funahashimur, Nakaniikawa-gun Toyama 84, 93002, JP)
Kato, Norihiro (2-9-12, Inujimashinmachi Toyama-shi, Toyama 28, 93183, JP)
Yasuoka, Manabu (146 Nunoichishinmachi, Toyama-shi, Toyama 92, 93981, JP)
Kitajima, Kazuo (149-1, Yamamuro Toyama-shi, Toyama 06, 93980, JP)
Sonobe, Masaru (283-5, Takehana Funahashimur, Nakaniikawa-gun Toyama 84, 93002, JP)
Kato, Norihiro (2-9-12, Inujimashinmachi Toyama-shi, Toyama 28, 93183, JP)
Yasuoka, Manabu (146 Nunoichishinmachi, Toyama-shi, Toyama 92, 93981, JP)
Application Number:
PCT/JP2004/009157
Publication Date:
January 06, 2005
Filing Date:
June 29, 2004
Export Citation:
Assignee:
NACHI-FUJIKOSHI CORP. (1-1 Fujikoshi-Honmachi 1-chome, Toyama-shi, Toyama 11, 93085, JP)
Sato, Hideki (11-17, Higashiishiganemachi Toyama-shi, Toyama 64, 93009, JP)
Kitajima, Kazuo (149-1, Yamamuro Toyama-shi, Toyama 06, 93980, JP)
Sonobe, Masaru (283-5, Takehana Funahashimur, Nakaniikawa-gun Toyama 84, 93002, JP)
Kato, Norihiro (2-9-12, Inujimashinmachi Toyama-shi, Toyama 28, 93183, JP)
Yasuoka, Manabu (146 Nunoichishinmachi, Toyama-shi, Toyama 92, 93981, JP)
Sato, Hideki (11-17, Higashiishiganemachi Toyama-shi, Toyama 64, 93009, JP)
Kitajima, Kazuo (149-1, Yamamuro Toyama-shi, Toyama 06, 93980, JP)
Sonobe, Masaru (283-5, Takehana Funahashimur, Nakaniikawa-gun Toyama 84, 93002, JP)
Kato, Norihiro (2-9-12, Inujimashinmachi Toyama-shi, Toyama 28, 93183, JP)
Yasuoka, Manabu (146 Nunoichishinmachi, Toyama-shi, Toyama 92, 93981, JP)
International Classes:
B23B27/14; B23B51/00; B23P15/28; C23C14/32; C23C14/54; (IPC1-7): C23C14/32; B23B27/14; B23B51/00; B23P15/28
Attorney, Agent or Firm:
Asamura, Kiyoshi (New Ohtemachi Bldg, Room 331 2-1, Ohtemachi 2-chom, Chiyoda-ku Tokyo 04, 10000, JP)