Title:
PRODUCTION MANAGEMENT SYSTEM, AND HOST COMPUTER AND RECORDED MEDIUM USED IN THE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2002/041206
Kind Code:
A1
Abstract:
A production management system for a sputtering target is constructed by using a computer network between a target maker and a target user. Various kinds of information on the production management such as history information of backing plates, production information on the sputtering target, and use information on the sputtering target.
Inventors:
NAKAJIMA KOICHI (JP)
YAJIMA NORIYUKI (JP)
WATATANI KENICHI (JP)
YAJIMA NORIYUKI (JP)
WATATANI KENICHI (JP)
Application Number:
PCT/JP2001/007937
Publication Date:
May 23, 2002
Filing Date:
September 13, 2001
Export Citation:
Assignee:
NIKKO MATERIALS CO LTD (JP)
NAKAJIMA KOICHI (JP)
YAJIMA NORIYUKI (JP)
WATATANI KENICHI (JP)
NAKAJIMA KOICHI (JP)
YAJIMA NORIYUKI (JP)
WATATANI KENICHI (JP)
International Classes:
G06Q10/06; C23C14/34; G05B19/418; G06Q50/00; G06Q50/04; (IPC1-7): G06F17/60
Foreign References:
| JP2000035994A | 2000-02-02 |
Attorney, Agent or Firm:
Arafune, Hiroshi (18 Iwato-ch, Shinjuku-ku Tokyo, JP)
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