PRODUCTION METHOD FOR CHIP MADE OF THERMOELECTRIC CONVERSION MATERIAL AND METHOD FOR MANUFACTURING THERMOELECTRIC CONVERSION MODULE USING CHIP OBTAINED BY SAID PRODUCTION METHOD

Title:

PRODUCTION METHOD FOR CHIP MADE OF THERMOELECTRIC CONVERSION MATERIAL AND METHOD FOR MANUFACTURING THERMOELECTRIC CONVERSION MODULE USING CHIP OBTAINED BY SAID PRODUCTION METHOD

Document Type and Number:

WIPO Patent Application WO/2020/045379

Kind Code:

A1

Abstract:

Provided are: a method for producing a chip made of a thermoelectric conversion material, wherein thermoelectric conversion material can be annealed in a form not having a junction with an electrode, and the thermoelectric conversion material can be annealed at the optimal annealing temperature; and a method for manufacturing a thermoelectric conversion module using the chip (13). Also provided are a production method for a chip made of a thermoelectric conversion material, and a method for manufacturing a thermoelectric conversion module using a chip obtained by said production method, the production method comprising: a step (A) for forming a sacrificial layer (2) on a substrate (1); a step (B) for forming a chip, made of the thermoelectric conversion material, on the sacrificial layer (2) obtained from the step (A); a step (C) for annealing the chip, made of the thermoelectric conversion material, obtained from the step (B); and a step (D) for peeling off the annealed chip, made of the thermoelectric conversion material, obtained from the step (C).

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Inventors:

TODAKA MASAYA (JP)
KATO KUNIHISA (JP)
MUTO TSUYOSHI (JP)
KATSUTA YUMA (JP)

Application Number:

PCT/JP2019/033408

Publication Date:

March 05, 2020

Filing Date:

August 27, 2019

Export Citation:

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Assignee:

LINTEC CORP (JP)

International Classes:

H01L35/34; H01L35/08; H01L35/32

Foreign References:

US7531739B1	2009-05-12
JP2017098283A	2017-06-01
JP2010109132A	2010-05-13
US20030041892A1	2003-03-06
JP2013251333A	2013-12-12
JP2017041540A	2017-02-23

Attorney, Agent or Firm:

OHTANI PATENT OFFICE (JP)

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