Title:
PRODUCTION METHOD FOR COMPOSITE OXIDE THIN FILM AND DEVICE THEREFOR AND COMPOSITE OXIDE FILM PRODUCED THEREBY
Document Type and Number:
WIPO Patent Application WO/2002/020879
Kind Code:
A1
Abstract:
A method and a device for producing a composite oxide thin film easily at low temperatures, which provide an excellent crystallinity, control a basic unit lattice structure, and require no post-treatment; and a composite oxide thin film, especially, a Cu-based high-temperature superconducting thin film produced thereby. A discharge supply layer (1) and a superconducting layer (2) constituting a Cu-based high-temperature superconducting thin film are sputtered by alternately controlling in film thickness a charge supply layer-use target having the composition of the charge supply layer (1) and a superconducting layer-use target having the composition of the superconduction layer (2), and the alternate sputters are repeated a required number of times to produce a Cu-based superconducting thin film having a desired film thickness. For the charge supply layer-use target, a charge supply layer-composition target is used in which part of Cu is substituted by an element having a structure stabilizing effect.
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Inventors:
IHARA HIDEO (JP)
ATHINARAYANAN SUNDARESAN (JP)
NIE JIACAI (JP)
ATHINARAYANAN SUNDARESAN (JP)
NIE JIACAI (JP)
Application Number:
PCT/JP2001/007280
Publication Date:
March 14, 2002
Filing Date:
August 24, 2001
Export Citation:
Assignee:
JAPAN SCIENCE & TECH CORP (JP)
NAT INST OF ADVANCED IND SCIEN (JP)
IHARA HIDEO (JP)
ATHINARAYANAN SUNDARESAN (JP)
NIE JIACAI (JP)
NAT INST OF ADVANCED IND SCIEN (JP)
IHARA HIDEO (JP)
ATHINARAYANAN SUNDARESAN (JP)
NIE JIACAI (JP)
International Classes:
C01G3/00; C04B35/45; C23C14/08; C30B23/02; G11B5/65; C30B29/22; H01B13/00; H01L39/12; H01L39/24; G11B11/105; (IPC1-7): C30B23/02; C30B29/22; C01G15/00; C01G3/00; G11B5/65
Foreign References:
| JPH11278996A | 1999-10-12 | |||
| JP2000086388A | 2000-03-28 | |||
| JPH10236821A | 1998-09-08 | |||
| JPH05279192A | 1993-10-26 |
Other References:
HIDEO IHARA ET AL.: "Cu-1234kei wo moto ni shita saikou seinou kouonn choudendou zairyou no sousei ni kansuru kenkyuu", DENSHI GIJUTSU SOUGOU KENKYUUSHO IHOU, vol. 63, no. 1-2, 20 March 1999 (1999-03-20), pages 67 - 75, XP002947318
M. ALEXE ET AL.: "Self-patterning nano-electrodes on ferroelectric thin films for gigabit memory applications", APPL. PHYS. LETT., vol. 73, no. 11, 14 September 1998 (1998-09-14), pages 1592 - 1594, XP002947319
See also references of EP 1342820A4
M. ALEXE ET AL.: "Self-patterning nano-electrodes on ferroelectric thin films for gigabit memory applications", APPL. PHYS. LETT., vol. 73, no. 11, 14 September 1998 (1998-09-14), pages 1592 - 1594, XP002947319
See also references of EP 1342820A4
Attorney, Agent or Firm:
Hirayama, Kazuyuki (Shinjukugyoen Bldg. 3-10, Shinjuku 2-chom, Shinjuku-ku Tokyo, JP)
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