Title:
PRODUCTION METHOD AND PRODUCTION DEVICE FOR ORGANIC EL DISPLAY DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/189906
Kind Code:
A1
Abstract:
According to one embodiment, the production method for an organic EL display device involves performing a reforming treatment on a vapor deposition mask at a surface thereof that faces a vapor deposition source (S2), mounting a support substrate on one surface of the vapor deposition mask (S3), spattering a desired organic material at the vapor deposition mask so as to form an organic layer that comprises a plurality of layers at a desired location on the support substrate (S4), and forming a second electrode on the organic layer (S8). Before the formation of the organic layer that comprises a plurality of layers, before or after the formation of each of the layers of the organic layer that comprises a plurality of layers, and/or before the formation of the second electrode, an exposed surface of the vapor deposition mask or an exposed surface of the organic layer that has been formed on the vapor deposition mask is reformed.
Inventors:
KISHIMOTO KATSUHIKO (JP)
Application Number:
PCT/JP2017/015381
Publication Date:
October 18, 2018
Filing Date:
April 14, 2017
Export Citation:
Assignee:
SAKAI DISPLAY PRODUCTS CORP (JP)
International Classes:
H05B33/10; C23C14/24; H01L27/32; H01L51/50
Foreign References:
| JP2016065310A | 2016-04-28 | |||
| JP2014218735A | 2014-11-20 | |||
| JP2016092148A | 2016-05-23 | |||
| KR20110089549A | 2011-08-09 | |||
| JP3202183U | 2016-01-21 | |||
| JP2011214078A | 2011-10-27 | |||
| CN203932122U | 2014-11-05 | |||
| JP2011231343A | 2011-11-17 |
Attorney, Agent or Firm:
ASAHINA & CO. (JP)
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