Title:
PRODUCTION METHOD FOR MAGNETORESISTIVE ELEMENT
Document Type and Number:
WIPO Patent Application WO/2017/068611
Kind Code:
A1
Abstract:
The present invention provides a production method for a magnetoresistance effect element, by which throughput can be improved and a high MR ratio can be obtained. A production method for a magnetoresistive element according to one embodiment of the present invention includes: a step for forming a first ferromagnetic layer; a step for forming a tunnel barrier layer on the first ferromagnetic layer within a first chamber; and a step for forming a second ferromagnetic layer over the tunnel barrier layer. The step for forming the tunnel barrier layer has: a step for depositing a metal layer on the first ferromagnetic layer; a step for oxidizing the metal layer; and a step, preceding the step for forming the second ferromagnetic layer, for reducing the pressure within the first chamber to a prescribed pressure at which the metal layer vaporizes while the temperature in the chamber is maintained at a prescribed temperature.
Inventors:
NAGAMINE YOSHINORI (JP)
SARUYA TAKESHI (JP)
SARUYA TAKESHI (JP)
Application Number:
PCT/JP2015/005307
Publication Date:
April 27, 2017
Filing Date:
October 21, 2015
Export Citation:
Assignee:
CANON ANELVA CORP (JP)
International Classes:
H01L43/08; H01L43/12; H01L43/10
Domestic Patent References:
| WO2014097510A1 | 2014-06-26 | |||
| WO2011081203A1 | 2011-07-07 |
Foreign References:
| JP2012114442A | 2012-06-14 | |||
| JP2011054873A | 2011-03-17 |
Attorney, Agent or Firm:
OKABE, Yuzuru et al. (JP)
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