Title:
PRODUCTION METHOD FOR RECOVERING AND PURIFYING ELECTRONIC-GRADE HEXAFLUOROETHANE
Document Type and Number:
WIPO Patent Application WO/2023/056655
Kind Code:
A1
Abstract:
Provided is a production method for recovering and purifying electronic-grade hexafluoroethane from industrial waste gas resulting from the production of carbon tetrafluoride. The production method comprises: conveying hexafluoroethane-containing carbon tetrafluoride waste gas to a vaporizer and a gas buffer device which are connected in sequence; pressurizing the gas by means of a diaphragm compressor, and then introducing same into an adsorption device, wherein the adsorption device comprises a first high-pressure adsorption tower, a second high-pressure adsorption tower, and a third high-pressure adsorption tower, which is filled with a fluoride adsorbent having a high cohesive energy density; then introducing same into a precision filter for filtering, returning the carbon tetrafluoride gas introduced into the top of a low-boiling-point rectifying tower to a carbon tetrafluoride production system, and introducing a tower-bottom liquid to a first high-boiling-point tower via a valve group; and bringing hexafluoroethane gas containing high-boiling-point impurities into the first high-boiling-point tower, then removing the high-boiling-point impurities at the bottom of the tower, bringing hexafluoroethane, which contains a small amount of high-boiling-point impurities and is discharged from the top of the tower, into a second high-boiling-point tower via a valve group, and bringing product gas at the top of the second high-boiling-point tower, namely electronic-grade hexafluoroethane, into a product tank.
Inventors:
LI JIMING (CN)
ZHANG CHAOCHUN (CN)
LIU ZHIQIANG (CN)
LIN BAIZHI (CN)
LI XIANGRU (CN)
ZHANG KUI (CN)
LI JIALEI (CN)
CHEN SHIHUA (CN)
QUE XIANGYU (CN)
ZHANG CHAOCHUN (CN)
LIU ZHIQIANG (CN)
LIN BAIZHI (CN)
LI XIANGRU (CN)
ZHANG KUI (CN)
LI JIALEI (CN)
CHEN SHIHUA (CN)
QUE XIANGYU (CN)
Application Number:
PCT/CN2021/123004
Publication Date:
April 13, 2023
Filing Date:
October 11, 2021
Export Citation:
Assignee:
FUJIAN DEER TECH CORP (CN)
International Classes:
C07C17/38; C07C17/383; C07C17/389; C07C19/08
Foreign References:
| CN111018662A | 2020-04-17 | |||
| CN111908996A | 2020-11-10 | |||
| CN206736134U | 2017-12-12 | |||
| CN103664501A | 2014-03-26 | |||
| CN105552323A | 2016-05-04 |
Attorney, Agent or Firm:
XIAMEN YUANCHUANG PATENT FIRM (GENERAL PARTNERSHIP) (CN)
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