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Patent Searching and Data


Title:
PRODUCTION SYSTEM FOR PRINTING ELECTRONIC DEVICES
Document Type and Number:
WIPO Patent Application WO/2015/098892
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a production line system for printing electronic devices which is capable of inhibiting product defects due to dust generated by the printing method, and which is capable of improving productivity with regard to the electronic devices. Accordingly, the present invention is provided with: a conveyance chamber (1) provided with a robot conveyance line (100) along which self-propelled robots (111, 121) for conveying substrates (15) in an open state travel; and a plurality of processing chambers (6). Substrate delivery areas (601) where the substrates (15) are loaded and unloaded are provided between the conveyance chamber (1) and each of the processing chambers (6). The conveyance chamber (1) and the substrate delivery areas (601) are connected by openings (602) through which a unidirectional flow of air from the conveyance-chamber (1) side to the processing-chamber (6) side is generated. The unidirectional flow of air through the openings (602) is generated by adjusting the air pressure inside the conveyance chamber (1) so as to be higher than the air pressures in the substrate delivery areas (601).

Inventors:
NISHI SHINICHI (JP)
KONDOH HITOSHI (JP)
KINA OSAMU (JP)
Application Number:
PCT/JP2014/084001
Publication Date:
July 02, 2015
Filing Date:
December 22, 2014
Export Citation:
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Assignee:
KONICA MINOLTA INC (JP)
RICOH CO LTD (JP)
TOPPAN PRINTING CO LTD (JP)
International Classes:
H01L21/677; H01L21/02; H01L51/50; H05B33/10
Foreign References:
JPH1022358A1998-01-23
JP2000082731A2000-03-21
Attorney, Agent or Firm:
MARUYAMA EIICHI (JP)
Maruyama Eiichi (JP)
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