Title:
PROGRAM FOR CORRECTING CHARGED PARTICLE RADIATION LOCATION, DEVICE FOR CALCULATING DEGREE OF CORRECTION OF CHARGED PARTICLE RADIATION LOCATION, CHARGED PARTICLE RADIATION SYSTEM, AND METHOD FOR CORRECTING CHARGED PARTICLE RADIATION LOCATION
Document Type and Number:
WIPO Patent Application WO/2014/148096
Kind Code:
A1
Abstract:
The present invention provides a program for correcting a charged particle radiation location, a device for calculating degree of correction of charged particle radiation location, a charged particle radiation system, and a method for correcting a charged particle radiation location. The program for correcting a charged particle radiation location is capable of accurately correcting the location of charged-particle radiation, and improving the location accuracy of a drawing pattern. In the program for correcting the location of electron beam radiation, a control unit (22) is made to function as: a charge-density-distribution-computing means that substitutes the charging of a resist into the surface charge in an interface between a resist (R) and a mask substrate (M), and computes the charge density distribution of the substituted surface charge; a trajectory-computing means that computes the trajectory of charged particles on the basis of the charge density distribution; an error-amount-computing means that computes the amount of error of a location of electron beam radiation on the basis of the trajectory of the charged particle; and as a radiation-location-correction amount-computing means that computes the amount of correction of the location of electron beam radiation on the basis of the error amount.
Inventors:
OOKAWA YOHEI (JP)
OZAWA HIDENORI (JP)
OZAWA HIDENORI (JP)
Application Number:
PCT/JP2014/051308
Publication Date:
September 25, 2014
Filing Date:
January 22, 2014
Export Citation:
Assignee:
DAINIPPON PRINTING CO LTD (JP)
International Classes:
H01L21/027; G03F7/20
Foreign References:
| JP2007324175A | 2007-12-13 | |||
| JP2009260250A | 2009-11-05 | |||
| JP2003187175A | 2003-07-04 | |||
| JP2007324175A | 2007-12-13 |
Other References:
See also references of EP 2978010A4
Attorney, Agent or Firm:
SHOBAYASHI, Masayuki et al. (JP)
Right wood Masayuki (JP)
Right wood Masayuki (JP)
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