Title:
PROJECTION METHOD COMPRISING PUPILLARY FILTRATION AND A PROJECTION LENS THEREFOR
Document Type and Number:
WIPO Patent Application WO2003093903
Kind Code:
A3
Abstract:
The invention relates to a catadioptric projection lens comprising a plurality of optical elements, which are arranged along an optical axis and comprise at least one concave mirror located in the vicinity of a pupillar surface of the projection lens. The concave mirror is sub-divided into a number of annular or honeycomb mirror segments, which can be displaced independently in relation to one another with the aid of piezoelectric drive elements. The mirror can be used as a phase-shifting pupillar filter, whereby the filtration function can be adjusted by the relative displacement of the mirror elements in relation to one another.
Inventors:
HOLDERER HUBERT (DE)
HEMBD-SOELLNER CHRISTIAN (DE)
VON BUENAU RUDOLF (DE)
HAAG ULRICH (DE)
HEMBD-SOELLNER CHRISTIAN (DE)
VON BUENAU RUDOLF (DE)
HAAG ULRICH (DE)
Application Number:
PCT/EP2003/004013
Publication Date:
July 01, 2004
Filing Date:
April 17, 2003
Export Citation:
Assignee:
ZEISS CARL SMT AG (DE)
HOLDERER HUBERT (DE)
HEMBD-SOELLNER CHRISTIAN (DE)
VON BUENAU RUDOLF (DE)
HAAG ULRICH (DE)
HOLDERER HUBERT (DE)
HEMBD-SOELLNER CHRISTIAN (DE)
VON BUENAU RUDOLF (DE)
HAAG ULRICH (DE)
International Classes:
G02B17/08; G02B26/06; G02B27/58; G02B5/10; G03F7/20; H01L21/027; (IPC1-7): G02B26/08; G02B26/06; G03F7/20
Foreign References:
| EP0736789A2 | 1996-10-09 | |||
| EP0638847A1 | 1995-02-15 |
Other References:
PATENT ABSTRACTS OF JAPAN vol. 014, no. 033 (M - 923) 22 January 1990 (1990-01-22)
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