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Patent Searching and Data


Title:
PROJECTION OPTICAL SYSTEM AND PROJECTION EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2013/011547
Kind Code:
A1
Abstract:
This projection optical system is equipped with a condensing power lens group and a divergent power lens group having a refractive index temperature coefficient with the same sign as that of the condensing power lens group. The condensing power lens group includes a lens with a focal point distance of 1 m or less, and the lens with a focal point distance of 1 m or less is arranged separated from the adjacent lens by an air space of ten percent or less of the focal point distance.

Inventors:
LEE Duk (9-6, Oyamagaoka 3-chome, Machida-sh, Tokyo 15, 〒1940215, JP)
李徳 (〒15 東京都町田市小山ヶ丘3丁目9番地6 株式会社オーク製作所内 Tokyo, 〒1940215, JP)
HAMAWAKI Tomohiro (9-6, Oyamagaoka 3-chome, Machida-sh, Tokyo 15, 〒1940215, JP)
Application Number:
JP2011/066248
Publication Date:
January 24, 2013
Filing Date:
July 15, 2011
Export Citation:
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Assignee:
ORC MANUFACTURING CO., LTD. (9-6 Oyamagaoka 3-chome, Machida-shi Tokyo, 15, 〒1940215, JP)
株式会社オーク製作所 (〒15 東京都町田市小山ヶ丘3丁目9番地6 Tokyo, 〒1940215, JP)
LEE Duk (9-6, Oyamagaoka 3-chome, Machida-sh, Tokyo 15, 〒1940215, JP)
李徳 (〒15 東京都町田市小山ヶ丘3丁目9番地6 株式会社オーク製作所内 Tokyo, 〒1940215, JP)
International Classes:
G02B13/24; G02B17/08; H01L21/027
Foreign References:
JP2004126520A2004-04-22
JP2011154198A2011-08-11
Attorney, Agent or Firm:
MATSUURA Takashi (Fuji Bldg. #418, 2-3 Marunouchi 3-chome, Chiyoda-k, Tokyo 05, 〒1000005, JP)
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Claims: