Title:
PROOF-MASS WITH SUPPORTING STRUCTURE ON INTEGRATED CIRCUIT-MEMS PLATFORM AND METHOD OF FABRICATING THE SAME
Document Type and Number:
WIPO Patent Application WO2008076172
Kind Code:
A9
Abstract:
Provided is a micro-electromechanical-system (MEMS) device including a substrate; at least one semiconductor layer provided on the substrate; a circuit region including at least one chip containing drive/sense circuitry, the circuit region provided on the at least one semiconductor layer; a support structure attached to the substrate; at least one elastic device attached to the support structure; a proof-mass suspended by the at least one elastic device and free to move in at least one of the x-, y-, and z-directions; at least one top electrode provided on the at least one elastic device; and at least one bottom electrode located beneath the at least one elastic device such that an initial capacitance is generated between the at least one top and bottom electrodes, wherein the drive/sense circuitry, proof-mass, supporting structure, and the at least one top and bottom electrodes are fabricated on the at least one semiconductor layer.
Inventors:
DIAMOND BRETT M (US)
ZELEZNIK MATTHEW A (US)
VANDEMEER JAN E (US)
GABRIEL KAIGHAM J (US)
ZELEZNIK MATTHEW A (US)
VANDEMEER JAN E (US)
GABRIEL KAIGHAM J (US)
Application Number:
PCT/US2007/022484
Publication Date:
October 09, 2008
Filing Date:
October 24, 2007
Export Citation:
Assignee:
AKUSTICA INC (US)
DIAMOND BRETT M (US)
ZELEZNIK MATTHEW A (US)
VANDEMEER JAN E (US)
GABRIEL KAIGHAM J (US)
DIAMOND BRETT M (US)
ZELEZNIK MATTHEW A (US)
VANDEMEER JAN E (US)
GABRIEL KAIGHAM J (US)
International Classes:
G01P15/125
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