Title:
PROTECTIVE FILM-FORMING METHOD AND PROTECTIVE FILM-FORMING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/032302
Kind Code:
A1
Abstract:
Disclosed is a protective film-forming apparatus for forming a magnesium oxide protective
film on a front glass substrate (11) in a deposition chamber (201). This protective
film-forming apparatus comprises an oxygen discharge port (222) for introducing
oxygen into the deposition chamber (201), a water vapor discharge port (210)
for introducing water vapor into the deposition chamber (201) from the downstream
side of the carrying direction of the front glass substrate (11), a mass analyzer
(224) for measuring the hydrogen ion intensity and the oxygen ion intensity in
the deposition chamber (201), a mass flow controller (215) for controlling the
introduction rate of water vapor basing on the ion intensity measured by the mass
analyzer (224), and a mass flow controller (221) for controlling the introduction
rate of oxygen basing on the ion intensity measured by the mass analyzer (224).
Inventors:
UETANI KAZUO
MIZOKAMI KANAME
OOE YOSHINAO
SHIOKAWA AKIRA
KADOU HIROYUKI
MIZOKAMI KANAME
OOE YOSHINAO
SHIOKAWA AKIRA
KADOU HIROYUKI
Application Number:
PCT/JP2006/317965
Publication Date:
March 22, 2007
Filing Date:
September 11, 2006
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD (JP)
UETANI KAZUO
MIZOKAMI KANAME
OOE YOSHINAO
SHIOKAWA AKIRA
KADOU HIROYUKI
UETANI KAZUO
MIZOKAMI KANAME
OOE YOSHINAO
SHIOKAWA AKIRA
KADOU HIROYUKI
International Classes:
C23C14/24; C23C14/08; H01J9/02; H01J11/02; H01J11/12; H01J11/22; H01J11/24; H01J11/26; H01J11/34; H01J11/40
Foreign References:
JPH10106441A | 1998-04-24 | |||
JPH09295894A | 1997-11-18 | |||
JPH11312469A | 1999-11-09 | |||
JP2002069617A | 2002-03-08 |
Other References:
See also references of EP 1925689A4
Attorney, Agent or Firm:
IWAHASHI, Fumio et al. (1006, Oaza Kadom, Kadoma-shi Osaka 01, JP)
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