Title:
PROTECTIVE FILM FORMING METHOD, AND SURFACE FLATTENING METHOD
Document Type and Number:
WIPO Patent Application WO/2012/029765
Kind Code:
A1
Abstract:
Provided is a method for flattening the surface of a substrate having irregularities on a film-formed surface, using an organic thin film-forming material having light-curable properties. Also provided is a method for forming a protective film. A gas of an organic thin film-forming material having light-curable properties is liquefied on the surface of a substrate (5) having irregularities, to form a liquid organic layer on the substrate surface (first liquid layer formation step T1), and formation is completed with the formation of a liquid organic layer on the surface (first growth termination step T2). In order to minimize evaporation of the liquid organic thin film material, pressure is set to a pressure at or above a first curing pressure which is the evaporation pressure of the organic thin film material, and the substrate is subjected to ultraviolet radiation to cure the film (flattening layer formation step T3), to form a flattening layer. When a first ceramic layer, a buffer layer and a second ceramic layer are deposited in that order on the flattening layer, a first and second ceramic layer having a thick total film thickness are formed.
Inventors:
OMORI, Daisuke (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
大森 大輔 (〒43 神奈川県茅ヶ崎市萩園２５００ 株式会社アルバック内 Kanagawa, 〒2538543, JP)
大森 大輔 (〒43 神奈川県茅ヶ崎市萩園２５００ 株式会社アルバック内 Kanagawa, 〒2538543, JP)
Application Number:
JP2011/069583
Publication Date:
March 08, 2012
Filing Date:
August 30, 2011
Export Citation:
Assignee:
ULVAC, INC. (2500, Hagisono Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
OMORI, Daisuke (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
株式会社アルバック (〒43 神奈川県茅ヶ崎市萩園２５００ Kanagawa, 〒2538543, JP)
OMORI, Daisuke (INC. 2500, Hagisono, Chigasaki-sh, Kanagawa 43, 〒2538543, JP)
International Classes:
B05D3/06; B05D7/00
Attorney, Agent or Firm:
ISHIJIMA, Shigeo et al. (Toranomonkougyou Bldg, 3F 1-2-18, Toranomon, Minato-k, Tokyo 01, 〒1050001, JP)
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Claims:
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