Title:
PROTECTIVE FILM
Document Type and Number:
WIPO Patent Application WO/2007/138683
Kind Code:
A1
Abstract:
A protective film (1) for photomasks which comprises a base film (2) having light-transmitting
properties, a release layer (3) disposed on one side of the base film (2), and a
pressure-sensitive adhesive layer (4) disposed on the other side of the base
film (2), wherein the pressure-sensitive adhesive layer (4) is made of a pressure-sensitive
adhesive composition comprising as essential ingredients an amidated acrylic
resin (A), an aliphatic isocyanate (B), and an antioxidant (C). The protective
film (1) is suitable for use in exposing a tacky photoresist to light. Even when
exposure to ultraviolet is repeatedly conducted, the pressure-sensitive adhesive
layer is inhibited from yellowing and is effectively prevented from decreasing
in peel strength.
Inventors:
HAYASHI TORAO (JP)
NAKAYA YOKO (JP)
KADOWAKI AKINORI (JP)
NAKAYA YOKO (JP)
KADOWAKI AKINORI (JP)
Application Number:
PCT/JP2006/310804
Publication Date:
December 06, 2007
Filing Date:
May 30, 2006
Export Citation:
Assignee:
SOMAR CORP (JP)
HAYASHI TORAO (JP)
NAKAYA YOKO (JP)
KADOWAKI AKINORI (JP)
HAYASHI TORAO (JP)
NAKAYA YOKO (JP)
KADOWAKI AKINORI (JP)
International Classes:
G03F1/48
Foreign References:
| JP2002338917A | 2002-11-27 | |||
| JP2003329838A | 2003-11-19 | |||
| JP2002072453A | 2002-03-12 |
Attorney, Agent or Firm:
WATANABE, Kazuhira (No.8 Kikuboshi Tower Building20-18, Asakusabashi 3-chome,Taito-k, Tokyo 53, JP)
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