Title:
PROTECTIVE MEMBRANE FORMING FILM, PROTECTIVE MEMBRANE FORMING SHEET, COMPOUND SHEET FOR FORMING PROTECTIVE MEMBRANE, AND PRODUCT MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2015/111631
Kind Code:
A1
Abstract:
Provided is protective membrane forming sheet (2) comprising: a protective membrane forming film (1) characterized by having a light transmittance at a wavelength of 1064nm of 55% or more and a light transmittance at a wavelength of 550nm of 20% or less; and a peeling sheet (21) which is layered upon one or both faces of the protective membrane forming film (1). According to this protective membrane forming sheet (2), it is possible to form a protective film which allows a workpiece such as a semiconductor wafer to have a reforming layer disposed in advance therein by a laser so that the workpiece can be split through the application of force thereon, while preventing grinding marks on the workpiece or a product formed therefrom from being visible to the naked eye.
Inventors:
YAMAMOTO DAISUKE (JP)
YONEYAMA HIROYUKI (JP)
YONEYAMA HIROYUKI (JP)
Application Number:
PCT/JP2015/051566
Publication Date:
July 30, 2015
Filing Date:
January 21, 2015
Export Citation:
Assignee:
LINTEC CORP (JP)
International Classes:
H01L21/02; C09J7/10; H01L21/301
Foreign References:
| JP2013120841A | 2013-06-17 | |||
| JP2013120839A | 2013-06-17 | |||
| JP2012033741A | 2012-02-16 | |||
| JP2011139042A | 2011-07-14 | |||
| JP2007123404A | 2007-05-17 | |||
| JP2012169441A | 2012-09-06 | |||
| JP2013146903A | 2013-08-01 | |||
| JP2012156217A | 2012-08-16 |
Attorney, Agent or Firm:
SHIGA, Masatake et al. (JP)
Masatake Shiga (JP)
Masatake Shiga (JP)
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