PROTON BEAM ASSISTED ULTRAPRECISE PROCESSING METHOD FOR PROCESSING SINGLE-CRYSTAL FRAGILE MATERIAL

WIPO Patent Application WO/2010/135949

A1

A proton beam assisted ultraprecise processing method for processing single-crystal fragile material includes the following steps: a) utilizing a simulation software to simulate processing parameters according to a cutting depth, a surface roughness or other processing requirements; b) using particle beams to bombard or irradiate a surface of a single-crystal fragile material to be processed, and applying energy and dosage obtained by the simulation result; c) utilizing an ultraprecise cutting technology to perform an ultraprecise cutting processing on the single-crystal material bombarded by the particle beams; and d) testing the surface quality of the processed material, and comparing the improvement condition of the quality of the processed surfaces. The processing method of the invention can remarkably improve the processing precision and the surface roughness of the fragile material and greatly reduce the abrasion of tools.

JPS61189907

METHOD OF CUTTING CERAMIC SMALL PIECE

FANG FENGZHOU (CN)
CHEN YUNHUI (CN)
XU ZONGWEI (CN)
QIU ZHONGJUN (CN)
ZHANG XIAODONG (CN)
DAI TENGFEI (CN)
HU XIAOTANG (CN)

PCT/CN2010/072522

December 02, 2010

May 07, 2010

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UNIV TIANJIN (CN)
FANG FENGZHOU (CN)
CHEN YUNHUI (CN)
XU ZONGWEI (CN)
QIU ZHONGJUN (CN)
ZHANG XIAODONG (CN)
DAI TENGFEI (CN)
HU XIAOTANG (CN)

B28D1/32; B28D5/00; B28D7/00

CN101405847A	2009-04-08
CN1124364A	1996-06-12
CN1512602A	2004-07-14
JP2003257981A	2003-09-12
CN1696242A	2005-11-16

See also references of EP 2298521A4
None

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