PROTON BEAM ASSISTED ULTRAPRECISE PROCESSING METHOD FOR PROCESSING SINGLE-CRYSTAL FRAGILE MATERIAL

Title:

PROTON BEAM ASSISTED ULTRAPRECISE PROCESSING METHOD FOR PROCESSING SINGLE-CRYSTAL FRAGILE MATERIAL

Document Type and Number:

WIPO Patent Application WO/2010/135949

Kind Code:

A1

Abstract:

A proton beam assisted ultraprecise processing method for processing single-crystal fragile material includes the following steps: a) utilizing a simulation software to simulate processing parameters according to a cutting depth, a surface roughness or other processing requirements; b) using particle beams to bombard or irradiate a surface of a single-crystal fragile material to be processed, and applying energy and dosage obtained by the simulation result; c) utilizing an ultraprecise cutting technology to perform an ultraprecise cutting processing on the single-crystal material bombarded by the particle beams; and d) testing the surface quality of the processed material, and comparing the improvement condition of the quality of the processed surfaces. The processing method of the invention can remarkably improve the processing precision and the surface roughness of the fragile material and greatly reduce the abrasion of tools.

More Like This:

JP09070760	INNER CIRCUMFERENTIAL BLADE GRINDING WHEEL HAVING MULTIPLE LAYERED ABRASIVE GRAIN STRUCTURE
WO/2003/013816	METHOD AND DEVICE FOR SCRIBING BRITTLE MATERIAL SUBSTRATE
JP2006150844	CUTTING OR GRINDING PROCESSING OF HIGHLY BRITTLE MATERIAL

Inventors:

FANG, Fengzhou (College of Precision Instrument, Tianjin University92, Weijin Road, Nankai District, Tianjin 2, 300072, CN)
房丰洲 (中国天津市南开区卫津路92号天津大学精仪学院, Tianjin 2, 300072, CN)
CHEN, Yunhui (College of Precision Instrument, Tianjin University92, Weijin Road, Nankai District, Tianjin 2, 300072, CN)
陈耘辉 (中国天津市南开区卫津路92号天津大学精仪学院, Tianjin 2, 300072, CN)
XU, Zongwei (College of Precision Instrument, Tianjin University92, Weijin Road, Nankai District, Tianjin 2, 300072, CN)
徐宗伟 (中国天津市南开区卫津路92号天津大学精仪学院, Tianjin 2, 300072, CN)
QIU, Zhongjun (College of Precision Instrument, Tianjin University92, Weijin Road, Nankai District, Tianjin 2, 300072, CN)

Application Number:

CN2010/072522

Publication Date:

December 02, 2010

Filing Date:

May 07, 2010

Export Citation:

Click for automatic bibliography generation Help

Assignee:

TIANJIN UNIVERSITY (College of Precision Instrument and Opto-electronic Engineering Tianjin University, 92 Weijin Road, Nankai District, Tianjin 2, 300072, CN)
天津大学 (中国天津市南开区卫津路92号天津大学精仪学院, Tianjin 2, 300072, CN)
FANG, Fengzhou (College of Precision Instrument, Tianjin University92, Weijin Road, Nankai District, Tianjin 2, 300072, CN)
房丰洲 (中国天津市南开区卫津路92号天津大学精仪学院, Tianjin 2, 300072, CN)
CHEN, Yunhui (College of Precision Instrument, Tianjin University92, Weijin Road, Nankai District, Tianjin 2, 300072, CN)
陈耘辉 (中国天津市南开区卫津路92号天津大学精仪学院, Tianjin 2, 300072, CN)
XU, Zongwei (College of Precision Instrument, Tianjin University92, Weijin Road, Nankai District, Tianjin 2, 300072, CN)
徐宗伟 (中国天津市南开区卫津路92号天津大学精仪学院, Tianjin 2, 300072, CN)

International Classes:

B28D5/00; B28D1/32; B28D7/00

Download PDF:

View/Download PDF PDF Help

Previous Patent: SCANNING-PRINTING INTEGRATED APPARATUS

Next Patent: CONDUCTIVE SLURRY FOR SOLAR BATTERY AND PREPARATION METHOD THEREOF