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Title:
PROTON MICROSCOPE, WAVELENGTH DISPERSIVE SPECTROMETER, ENERGY DISPERSIVE SPECTROMETER, AND MICRO-NANO PROCESSING PLATFORM
Document Type and Number:
WIPO Patent Application WO/2018/152658
Kind Code:
A1
Abstract:
A proton microscope, a wavelength dispersive spectrometer, an energy dispersive spectrometer, and a micro-nano processing platform, which can achieve a proton transmission microscopy function; a proton scanning microscopy function; a proton energy spectrum analysis function; a proton diffraction spectrum function; a proton-to-atomic nucleus impact energy spectrum analysis function: bombarding a sample atomic nucleus by using a proton beam so that the atomic nucleus generates a Mossbauer spectral line, measuring the wavelength of the Mossbauer spectral line and energy of reflected and transmitted protons, and analyzing ingredients and content of the atomic nucleus as well as ingredients and content of an isotopic element; directionally combining the proton with a sample molecule so that hydrogen atoms can be added to the epitaxy or in the sample molecule: obtaining an electron by using the proton and then converting the electron into a hydrogen atom, and adding the hydrogen atom to the epitaxy or in the sample molecule to generate a new material; a micro-nano processing function of the proton beam on the sample: the proton has high mass and the sample is continuously bombarded by the proton beam under the control of a proton beam focusing system to perform micro-nano processing on the sample; and a proton beam photoetching function.

Inventors:
GU, Shiping (No.148-504, Shihuzhiyun Yuexi, Wuzhon, Suzhou Jiangsu 0, 215000, CN)
GU, Haitao (No.148-504, Shihuzhijun Yuexi, Wuzhon, Suzhou Jiangsu 0, 215000, CN)
Application Number:
CN2017/000252
Publication Date:
August 30, 2018
Filing Date:
March 24, 2017
Export Citation:
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Assignee:
GU, Shiping (No.148-504, Shihuzhiyun Yuexi, Wuzhon, Suzhou Jiangsu 0, 215000, CN)
International Classes:
H01J37/26
Foreign References:
CN105911681A2016-08-31
CN104299872A2015-01-21
CN103703537A2014-04-02
CN104272426A2015-01-07
CN101685754A2010-03-31
US20030127595A12003-07-10
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