Title:
PULSE-MODULATED HIGH-FREQUENCY POWER CONTROL METHOD AND PULSE-MODULATED HIGH-FREQUENCY POWER SOURCE DEVICE
Document Type and Number:
WIPO Patent Application WO/2011/016266
Kind Code:
A1
Abstract:
Disclosed is a pulse-modulated high-frequency power control method comprised of an output amplitude control process for controlling the amplitude of a pulse output and a duty control process for controlling the duty ratio of a pulse output. In the output amplitude control process, the amplitude value of a pulse output is controlled to perform a constant amplitude control so that the amplitude value is identical to a setup amplitude value. In the constant amplitude control performed by the output amplitude control, for example, the amplitude value of a pulse generated by controlling the electric power is fed back, a difference value between the feedback value and a predetermined setup amplitude value is obtained, and the amplitude vale of the pulse output is controlled so that the difference value is zero.
Inventors:
YUZURIHARA ITSUO (JP)
HATA YOSHIHISA (JP)
HATA YOSHIHISA (JP)
Application Number:
PCT/JP2010/053610
Publication Date:
February 10, 2011
Filing Date:
March 05, 2010
Export Citation:
Assignee:
KYOSAN ELECTRIC MFG (JP)
YUZURIHARA ITSUO (JP)
HATA YOSHIHISA (JP)
YUZURIHARA ITSUO (JP)
HATA YOSHIHISA (JP)
International Classes:
H05H1/46; H01L21/205; H01L21/3065; H03F3/217; H03K5/00; H03K5/156; H05H1/00
Foreign References:
| JP2004006571A | 2004-01-08 | |||
| JP2002324698A | 2002-11-08 | |||
| JP2001160549A | 2001-06-12 | |||
| JPH07335560A | 1995-12-22 | |||
| JP2007087908A | 2007-04-05 | |||
| JP2009111940A | 2009-05-21 | |||
| JPH0465820B2 | 1992-10-21 |
Other References:
See also references of EP 2416629A4
Attorney, Agent or Firm:
SHIONOIRI, Akio (JP)
Akio Shionoiri (JP)
Akio Shionoiri (JP)
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