Title:
PULSED GAS LASER DEVICE
Document Type and Number:
WIPO Patent Application WO/1999/060676
Kind Code:
A1
Abstract:
A pulsed gas laser device comprises a first main electrode (24), a cylindrical electrical discharge tube (21) of insulator to form a main electrical discharge path, and a second main electrode (25), which are arranged in line in this order, and medium gas is enclosed inside. A pair of mirrors (22) and (23) is arranged outside the first and second main electrodes to form an optical resonator, and a power supply (27) is provided for applying main discharge voltage between the first and second main electrodes. A cylindrical dielectric member (40) and an adjacent supplementary electrode (41) are provided near either or both of the first and second main electrodes. Means (28) for applying voltage to the supplementary electrode is provided so that plasma electrode (25a) may form inside the cylindrical dielectric member during operating.
Inventors:
NAKAMUTA HIRONORI (JP)
Application Number:
PCT/JP1999/002584
Publication Date:
November 25, 1999
Filing Date:
May 18, 1999
Export Citation:
Assignee:
TOSHIBA KK (JP)
NAKAMUTA HIRONORI (JP)
NAKAMUTA HIRONORI (JP)
International Classes:
H01S3/097; H01S3/03; H01S3/038; (IPC1-7): H01S3/038; H01S3/097
Foreign References:
| JPH01103889A | 1989-04-20 | |||
| JPH01282880A | 1989-11-14 | |||
| JPH05167157A | 1993-07-02 | |||
| JPS6424479A | 1989-01-26 |
Other References:
See also references of EP 0999619A4
Attorney, Agent or Firm:
Ohgo, Norio (Kawasaki-shi Kanagawa-ken, JP)
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