Title:
PULSED LIGHT GENERATION METHOD, PULSED LASER DEVICE, AND EXPOSURE DEVICE AND INSPECTION DEVICE PROVIDED WITH PULSED LASER DEVICE
Document Type and Number:
WIPO Patent Application WO/2015/125827
Kind Code:
A1
Abstract:
A pulsed light generation method that generates pulsed light by using an intensity-modulating electro-optical modulator to chop laser light that is output from a laser light source. The pulsed light generation method generates pulsed light by driving the electro-optical modulator using a drive signal that changes the voltage applied to the electro-optical modulator between a voltage that is lower than a reference voltage and a voltage that is higher than the reference voltage, the reference voltage being the voltage that is applied to the electro-optical modulator when the transmittance of the laser light transmitted through the electro-optical modulator is at a maximum.
Inventors:
INABA NAOTO (JP)
TOKUHISA AKIRA (JP)
TOKUHISA AKIRA (JP)
Application Number:
PCT/JP2015/054451
Publication Date:
August 27, 2015
Filing Date:
February 18, 2015
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02F1/03; G02F1/37; G03F7/20; H01L21/027; H01S3/00; H01S3/10
Foreign References:
| JPH1172761A | 1999-03-16 | |||
| JP2001326609A | 2001-11-22 | |||
| JP2000089176A | 2000-03-31 | |||
| JP2013156448A | 2013-08-15 | |||
| JP2012054500A | 2012-03-15 | |||
| JPH07142354A | 1995-06-02 | |||
| JPH07104223A | 1995-04-21 | |||
| JP2009003247A | 2009-01-08 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
Fuyuki Nagai (JP)
Fuyuki Nagai (JP)
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