Title:
PUMP BACKSTREAM PREVENTING STRUCTURE FOR SEMICONDUCTOR MANUFACTURING DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/006453
Kind Code:
A1
Abstract:
The disclosed pump backstream preventing structure for a semiconductor manufacturing device comprises a detection sensor, an isolation air supply pipe, and a control member. Accordingly, the pump backstream preventing structure can relatively reduce a time delay from the moment when an abnormal operation of a pump actually occurs until the moment when an isolation valve is blocked in comparison with a method of blocking an isolation valve through a device control unit of a semiconductor manufacturing device, and thus can prevent the occurrence of a backstream, by which particles inside a pumping pipe are introduced into a process chamber before the isolation valve is blocked.
Inventors:
KIM TAE WHA (KR)
Application Number:
PCT/KR2020/002786
Publication Date:
January 14, 2021
Filing Date:
February 27, 2020
Export Citation:
Assignee:
KIM TAE WHA (KR)
International Classes:
H01L21/67; F04D19/04
Foreign References:
| KR200484827Y1 | 2017-10-30 | |||
| KR20070033114A | 2007-03-26 | |||
| KR20060020200A | 2006-03-06 | |||
| KR101121597B1 | 2012-03-20 | |||
| KR100962547B1 | 2010-06-14 | |||
| KR102073789B1 | 2020-02-05 | |||
| KR20030009790A | 2003-02-05 |
Other References:
See also references of EP 3996131A4
Attorney, Agent or Firm:
LEE, Oh-sik (KR)
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