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Title:
PUMP DEVICE, AND METHOD FOR CONTROLLING SAME
Document Type and Number:
WIPO Patent Application WO/2013/121462
Kind Code:
A1
Abstract:
[Problem] To provide a pump device whereby it is possible to stabilize the discharge flow rate without relying on the external air temperature. To also provide a method for controlling said pump device. [Solution] This method for controlling a pump device involves: outputting a drive signal for driving a motor at a rotational speed at which gas is discharged from the discharge port of a pump main body at a standard flow rate; measuring the temperature of the pump main body or the temperature of the gas discharged from the discharge port by means of a temperature sensor attached to the pump main body; calculating the actual flow rate of the gas discharged from the discharge port on the basis of a temperature signal related to the temperature of the gas contained in the output of the temperature sensor; correcting the drive signal such that the actual flow rate matches the standard flow rate; and outputting the corrected drive signal to the motor.

Inventors:
NONOMURA, Yuji (INC. 291-7, Oaza Chausubaru, Saito-sh, Miyazaki 37, 〒8810037, JP)
野々村 勇治 (〒37 宮崎県西都市大字茶臼原291-7アルバック機工株式会社内 Miyazaki, 〒8810037, JP)
SUZUKI, Sachie (INC. 291-7, Oaza Chausubaru, Saito-sh, Miyazaki 37, 〒8810037, JP)
鈴木 佐智恵 (〒37 宮崎県西都市大字茶臼原291-7アルバック機工株式会社内 Miyazaki, 〒8810037, JP)
Application Number:
JP2012/001022
Publication Date:
August 22, 2013
Filing Date:
February 16, 2012
Export Citation:
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Assignee:
ULVAC KIKO, INC. (291-7, Oaza Chausubaru Saito-sh, Miyazaki 37, 〒8810037, JP)
アルバック機工株式会社 (〒37 宮崎県西都市大字茶臼原291-7 Miyazaki, 〒8810037, JP)
NONOMURA, Yuji (INC. 291-7, Oaza Chausubaru, Saito-sh, Miyazaki 37, 〒8810037, JP)
野々村 勇治 (〒37 宮崎県西都市大字茶臼原291-7アルバック機工株式会社内 Miyazaki, 〒8810037, JP)
SUZUKI, Sachie (INC. 291-7, Oaza Chausubaru, Saito-sh, Miyazaki 37, 〒8810037, JP)
International Classes:
F04B49/06; F04B45/04
Foreign References:
JP2007234443A2007-09-13
JP2005251694A2005-09-15
JP2009047084A2009-03-05
JP2007234443A2007-09-13
Other References:
See also references of EP 2816234A4
Attorney, Agent or Firm:
OMORI, Junichi (2nd Floor U&M Akasaka Bldg, 7-5-47 Akasaka, Minato-k, Tokyo 52, 〒1070052, JP)
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Claims: