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Patent Searching and Data


Title:
PUMP DEVICE AND SUBSTRATE PROCESSING DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/167402
Kind Code:
A1
Abstract:
A rolling diaphragm 25 is provided with: a liquid pressing part 41; a ring-shaped marginal part 43; and a folded cylindrical part 45 connecting the liquid pressing part 41 and the ring-shaped marginal part 43 to each other. The folded cylindrical part 45 has an overlapped portion 47 formed by being folded back. When an accommodation space 35 has a volume of 49 cc or less, a width WD1 of a gap 47A of the overlapped portion 47 of the folded cylindrical part 45 is 1/20 or more and 1/6 or less of a width WD2 of the liquid pressing part 41. Within this range, a chemical solution flows into the folded cylindrical part 45 easily. In addition, the chemical solution can relatively smoothly flow from an inflow port 37 to an outflow port 39 since disturbance in the flow of the chemical solution due to vortexes is reduced. That is, liquid replaceability at the folded cylindrical part is improved. Therefore, it is possible to prevent solidification of the chemical solution and entry of a resultant solidified matter into the chemical solution, and to maintain a cleanliness of the chemical solution.

Inventors:
NISHIMURA Junki (Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
OGURA Hiroyuki (Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
MOMMA Toru (Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
KIRITA Shoji (Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
SAGAWA Hidetoshi (Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
YOSHIDA Shogo (Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome, Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
Application Number:
JP2018/047350
Publication Date:
September 06, 2019
Filing Date:
December 21, 2018
Export Citation:
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Assignee:
SCREEN HOLDINGS CO., LTD. (Tenjinkita-machi 1-1, Teranouchi-agaru 4-chome Horikawa-dori, Kamigyo-ku, Kyoto-sh, Kyoto 85, 〒6028585, JP)
International Classes:
F04B43/02; B05C11/08; H01L21/027; H01L21/304; H01L21/306
Attorney, Agent or Firm:
SUGITANI Tsutomu (Nishitenma No.11 Matsuya Bldg, 10-8 Nishitenma 1-chome, Kita-ku, Osaka-sh, Osaka 47, 〒5300047, JP)
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