Title:
PUMP DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/207839
Kind Code:
A1
Abstract:
A pump device according to an embodiment of the present invention is provided with a fluid passage. The fluid passage has a first connection opening which is provided at a second end of a housing, a second connection opening which is provided in a first main surface of the housing, a first passage which extends parallel to the direction of a first axis from the first connection opening and which connects the first connection opening and the second connection opening, and a second passage which connects the first passage and a pump chamber. The first passage has side walls which face each other in the direction of a second axis perpendicular to the first axis, and a bottom wall which includes a pair of sloped surfaces sloped from both side walls toward between the axes of a pair of screw shafts within the pump chamber.
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Inventors:
SUZUKI TOSHIO (JP)
HASHIMOTO KENJI (JP)
HASHIMOTO KENJI (JP)
Application Number:
PCT/JP2018/046852
Publication Date:
October 31, 2019
Filing Date:
December 19, 2018
Export Citation:
Assignee:
ULVAC INC (JP)
International Classes:
F04C25/02; F04C18/16; F04C29/12
Domestic Patent References:
| WO2014112088A1 | 2014-07-24 |
Foreign References:
| JPS63156493U | 1988-10-13 |
Attorney, Agent or Firm:
OMORI, Junichi (JP)
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