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Patent Searching and Data


Title:
PUMP MONITORING DEVICE, VACUUM PROCESSING DEVICE, AND VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2018/198288
Kind Code:
A1
Abstract:
Provided is a pump monitoring device that detects abnormalities in a plurality of vacuum pumps which are connected to the same chamber. The pump monitoring device compares signals indicating the rotation state of the pump rotor of each of the plurality of vacuum pumps, and on the basis of such results, estimates if an abnormality is occurring in any the plurality of vacuum pumps.

Inventors:
TAMAI, Yusuke (1 Nishinokyo-Kuwabara-cho, Nakagyo-ku, Kyoto-sh, Kyoto 11, 〒6048511, JP)
NODA, Akira (1 Nishinokyo-Kuwabara-cho, Nakagyo-ku, Kyoto-sh, Kyoto 11, 〒6048511, JP)
Application Number:
JP2017/016818
Publication Date:
November 01, 2018
Filing Date:
April 27, 2017
Export Citation:
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Assignee:
SHIMADZU CORPORATION (1 Nishinokyo-Kuwabara-cho, Nakagyo-ku Kyoto-sh, Kyoto 11, 〒6048511, JP)
International Classes:
F04B49/10; F04D19/04
Foreign References:
JP2000283056A2000-10-10
JP2016094849A2016-05-26
JPH1054369A1998-02-24
Attorney, Agent or Firm:
NAGAI, Fuyuki (NAGAI & ASSOCIATES, SHINAGAWA CRYSTAL SQUARE BLDG. Suite No. 901 1-6-41, Kounan, Minato-k, Tokyo 75, 〒1080075, JP)
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