Title:
PUMP MONITORING DEVICE, VACUUM PUMP, AND PRODUCT-ACCUMULATION DIAGNOSIS DATA PROCESSING PROGRAM
Document Type and Number:
WIPO Patent Application WO/2020/194852
Kind Code:
A1
Abstract:
Provided is a pump monitoring device that diagnoses product accumulation inside a vacuum pump, the pump monitoring device including: an acquisition unit that acquires data indicating the pump state of the vacuum pump; a statistics calculation unit that calculates statistics indicating the width of the distribution of the data per predetermined time interval, on the basis of the data acquired by the acquisition unit; and a diagnosis unit that outputs diagnostic information of the vacuum pump about a product accumulation amount, on the basis of the statistics.
Inventors:
TAMAI YUSUKE (JP)
Application Number:
PCT/JP2019/045488
Publication Date:
October 01, 2020
Filing Date:
November 20, 2019
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2013161399A1 | 2013-10-31 |
Foreign References:
| JP2018040277A | 2018-03-15 | |||
| JP2016091417A | 2016-05-23 | |||
| JPH05141944A | 1993-06-08 | |||
| JP2019061602A | 2019-04-18 |
Other References:
See also references of EP 3951183A4
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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