Title:
PUMP UNIT FOR FEEDING CHEMICAL LIQUID
Document Type and Number:
WIPO Patent Application WO/2006/027909
Kind Code:
A1
Abstract:
A pump unit for feeding a chemical liquid capable of reducing the stagnation of air bubbles and chemical liquid in the chemical liquid flow passage of the unit while reducing a size by unitizing a pump and open/close valves on the upstream and downstream sides of the pump. The pump unit (10) is formed by integrally mounting a suction side flow passage member (17) to which a suction side cut-off valve (13) is integrally fitted and a discharge side flow passage member (18) to which a discharge side cut-off valve (14) is integrally fitted on the pump (11) (pump housings (21), (22)). Suction passages (17a) and (21b) and discharge passages (18a) and (21c) communicating with a pump chamber (25) are positioned on a same straightline (L1).
More Like This:
| JP03141875 | PASSIVELY ACTUATED VALVE |
| JP58211593 | PUMP INSERTING AND RETRACTING APPARATUS FOR LIQUEFIED- GAS TANK |
| JP2000002350 | CHECK VALVE |
Inventors:
Okumura, Katsuya c/o OCTEC INC. (22-1 Wakaba 1-chome, Shinjuku-k, Tokyo 11, 16000, JP)
Arakawa, Kazuhiro c/o CKD CORPORATION 250 (Ouji 2-chome Komaki-sh, Aichi 51, 48585, JP)
Itoh, Shigenobu c/o CKD CORPORATION 250 (Ouji 2-chome Komaki-sh, Aichi 51, 48585, JP)
Arakawa, Kazuhiro c/o CKD CORPORATION 250 (Ouji 2-chome Komaki-sh, Aichi 51, 48585, JP)
Itoh, Shigenobu c/o CKD CORPORATION 250 (Ouji 2-chome Komaki-sh, Aichi 51, 48585, JP)
Application Number:
PCT/JP2005/013920
Publication Date:
March 16, 2006
Filing Date:
July 29, 2005
Export Citation:
Assignee:
CKD CORPORATION (250 Ouji 2-chome, Komaki-shi Aichi, 51, 48585, JP)
OCTEC INC. (22-1, Wakaba 1-chome Shinjuku-k, Tokyo 11, 16000, JP)
TOKYO ELECTRON LIMITED (3-6 Akasaka 5-chome, Minato-ku, Tokyo, 107-8481, JP)
Okumura, Katsuya c/o OCTEC INC. (22-1 Wakaba 1-chome, Shinjuku-k, Tokyo 11, 16000, JP)
Arakawa, Kazuhiro c/o CKD CORPORATION 250 (Ouji 2-chome Komaki-sh, Aichi 51, 48585, JP)
Itoh, Shigenobu c/o CKD CORPORATION 250 (Ouji 2-chome Komaki-sh, Aichi 51, 48585, JP)
OCTEC INC. (22-1, Wakaba 1-chome Shinjuku-k, Tokyo 11, 16000, JP)
TOKYO ELECTRON LIMITED (3-6 Akasaka 5-chome, Minato-ku, Tokyo, 107-8481, JP)
Okumura, Katsuya c/o OCTEC INC. (22-1 Wakaba 1-chome, Shinjuku-k, Tokyo 11, 16000, JP)
Arakawa, Kazuhiro c/o CKD CORPORATION 250 (Ouji 2-chome Komaki-sh, Aichi 51, 48585, JP)
Itoh, Shigenobu c/o CKD CORPORATION 250 (Ouji 2-chome Komaki-sh, Aichi 51, 48585, JP)
International Classes:
F04B53/10; B05C11/10; F04B43/02; F04B43/06; F04B53/00; F04B53/06; H01L21/027
Attorney, Agent or Firm:
Yamada, Tsuyoshi (Daiichi Hasegawa Bldg. 6F, 13-24 Meieki 3-chome, Nakamura-ku, Nagoya-sh, Aichi 02, 45000, JP)
Download PDF: