Title:
PURGE APPARATUS AND PURGE METHOD
Document Type and Number:
WIPO Patent Application WO/2015/141246
Kind Code:
A1
Abstract:
The present invention prevents a nozzle from obstructing alignment of a container without using an actuator. In the cases where the nozzle comes into contact with the container before an aligning member comes into contact with the container, the container is guided by means of a guide surface of the nozzle, and at the same time, the aligning member and the container are brought into contact with each other by bringing down the nozzle by means of a load from the container, and the container is aligned by means of the aligning member, then a purge gas is injected to the container from the nozzle.
Inventors:
MURATA MASANAO (JP)
YAMAJI TAKASHI (JP)
YAMAJI TAKASHI (JP)
Application Number:
PCT/JP2015/050498
Publication Date:
September 24, 2015
Filing Date:
January 09, 2015
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
H01L21/677
Foreign References:
| JP2010182747A | 2010-08-19 | |||
| JP2011187539A | 2011-09-22 |
Other References:
See also references of EP 3121845A4
Attorney, Agent or Firm:
SHIOIRI Akira et al. (JP)
Akira Shioiri (JP)
Akira Shioiri (JP)
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