Title:
PURGE DEVICE, PURGE SYSTEM, PURGE METHOD, AND CONTROL METHOD IN PURGE SYSTEM
Document Type and Number:
WIPO Patent Application WO/2015/194255
Kind Code:
A1
Abstract:
A purge device (30) that purges, using a purge gas, the inside of storage containers (F) storing objects to be stored is provided with: a plurality of mounting portions (31) on which the storage containers are mounted; a plurality of supply pipes (33) for supplying the purge gas to the storage containers mounted on the mounting portions; a main pipe (41) having the supply pipes connected thereto and supplying the purge gas to the supply pipes; and a mass flow controller (MFC) (43) for adjusting the flow volume of the purge gas in the main pipe.
Inventors:
MURATA MASANAO (JP)
YAMAJI TAKASHI (JP)
ONISHI SHINJI (JP)
YAMAJI TAKASHI (JP)
ONISHI SHINJI (JP)
Application Number:
PCT/JP2015/062225
Publication Date:
December 23, 2015
Filing Date:
April 22, 2015
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
H01L21/673
Foreign References:
| JP2010182747A | 2010-08-19 | |||
| JP2013131712A | 2013-07-04 | |||
| JP2013133193A | 2013-07-08 | |||
| JP2000332095A | 2000-11-30 | |||
| US20090053017A1 | 2009-02-26 | |||
| JP2013139318A | 2013-07-18 | |||
| JP2013142009A | 2013-07-22 |
Other References:
See also references of EP 3157048A4
Attorney, Agent or Firm:
HASEGAWA Yoshiki et al. (JP)
Yoshiki Hasegawa (JP)
Yoshiki Hasegawa (JP)
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