Title:
PURGING DEVICE, PURGING STOCKER, AND PURGING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/038269
Kind Code:
A1
Abstract:
[Problem] To provide a purging device that can appropriately perform purging while also conserving a purge gas. [Solution] A purging device (4) that is provided with: a first purging nozzle (41) that supplies a purge gas (G1) to a container (F) that is a purging target; an internal-state detection unit (8) that detects the internal state of the container before the first nozzle begins a purging process; and a purge determination unit (48) that, on the basis of detection results from the internal-state detection unit, determines purging conditions for the container.
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Inventors:
MURATA MASANAO (JP)
YAMAJI TAKASHI (JP)
YAMAJI TAKASHI (JP)
Application Number:
PCT/JP2016/070855
Publication Date:
March 09, 2017
Filing Date:
July 14, 2016
Export Citation:
Assignee:
MURATA MACHINERY LTD (JP)
International Classes:
H01L21/673; B65G1/00
Domestic Patent References:
| WO2014141563A1 | 2014-09-18 |
Foreign References:
| JP2010072624A | 2010-04-02 | |||
| JP2010182747A | 2010-08-19 |
Attorney, Agent or Firm:
NISHI, Kazuya et al. (JP)
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