PURGING METHOD, APPARATUS TO BE PURGED AND PURGING APPARATUS

Title:

PURGING METHOD, APPARATUS TO BE PURGED AND PURGING APPARATUS

Document Type and Number:

WIPO Patent Application WO/1999/031445

Kind Code:

A1

Abstract:

An apparatus to be purged having at a portion to be purged thereof not less than two valve ports capable of being joined to even a circuit other than a main circuit; a purging apparatus having a substitution gas container which is filled in advance with a substitution gas for replacing a gas to be purged therewith, and a recovery gas container for recovering a gas containing a gas to be purged, one valve port of the portion to be purged and the substitution gas container, and the other valve port of the portion to be purged and the recovered gas container being connectable respectively; and a purging method characterized in that the substitution gas in the substitution gas container is sent out by using the apparatus to be purged and purging apparatus, to force out the gas to be purged from the apparatus to be purged and recover this gas to the recovery gas container.

Inventors:

KOBAYASHI YOSHINORI (JP)
FUJITAKA AKIRA (JP)

Application Number:

PCT/JP1998/005243

Publication Date:

June 24, 1999

Filing Date:

November 20, 1998

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD (JP)
KOBAYASHI YOSHINORI (JP)
FUJITAKA AKIRA (JP)

International Classes:

F17C13/00; F25B45/00; (IPC1-7): F25B43/04; F25B45/00

Foreign References:

JPH09133440A	1997-05-20
JPH09292171A	1997-11-11
JPH07270000A	1995-10-20
JPH05164437A	1993-06-29
JPH09133440A	1997-05-20

Other References: