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Title:
PURIFICATION DEVICE, PURIFICATION METHOD, MANUFACTURING DEVICE, METHOD OF MANUFACTURING CHEMICAL LIQUID, CONTAINER, AND CHEMICAL LIQUID HOUSING
Document Type and Number:
WIPO Patent Application WO/2017/188209
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a purification device through which a solvent having a reduced amount of impurities and a raw material for the solvent can be obtained. The present invention also addresses the problem of providing a purification method, a manufacturing device, and a method of manufacturing a chemical liquid. The present invention also addresses the problem of providing a container in which a chemical liquid is not susceptible to increases in the content of impurities, even if the container is filled with the chemical liquid and stored for a predetermined period of time. The present invention also addresses the problem of providing a chemical liquid housing. The purification device according to the present invention is a purification device provided with a distillation tower for purifying a chemical liquid, wherein: the inner wall of the distillation tower is coated with at least one material selected from the group consisting of a fluorine resin and an electro-polished metal material, or the inner wall is formed of said material; the metal material contains at least one selected from the group consisting of chromium and nickel; and the sum of the contents of chromium and nickel is greater than 25 mass% with respect to the total mass of the metal material.

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Inventors:
SHIMIZU Tetsuya (4000 Kawashiri, Yoshida-cho, Haibara-gu, Shizuoka 96, 〒4210396, JP)
KAMIMURA Tetsuya (4000 Kawashiri, Yoshida-cho, Haibara-gu, Shizuoka 96, 〒4210396, JP)
Application Number:
JP2017/016270
Publication Date:
November 02, 2017
Filing Date:
April 25, 2017
Export Citation:
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Assignee:
FUJIFILM CORPORATION (26-30, Nishiazabu 2-chome Minato-k, Tokyo 20, 〒1068620, JP)
International Classes:
B01D3/00; B01D71/26; B01D71/32; B01D71/36; B01D71/56; C07C29/145; C07C31/10; C07C67/08; C07C69/14
Foreign References:
JPH11180704A1999-07-06
JPH0739701A1995-02-10
JP2004114392A2004-04-15
JPS6341514A1988-02-22
JP2002363128A2002-12-18
Attorney, Agent or Firm:
WATANABE Mochitoshi et al. (Yusen Iwamoto-cho Bldg. 6F, 3-3 Iwamoto-cho 2-chome, Chiyoda-k, Tokyo 32, 〒1010032, JP)
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