Title:
PVD TREATMENT METHOD AND PVD TREATMENT DEVICE
Document Type and Number:
WIPO Patent Application WO/2014/057608
Kind Code:
A1
Abstract:
Provided are a method and device that make it possible to perform DVD treatment with uneven target consumption reliably minimized. This PVD treatment method includes the following: performing PVD treatment by producing discharges between a positive electrode (3) and a negative electrode (4) inside a vacuum chamber (2) to vaporize the negative electrode (4); and during said PVD treatment, circulating a cooling medium through a cooling channel formed on either the positive electrode (3) or the negative electrode (4), i.e. the "cooled electrode", thereby cooling said electrode, and reversing the circulation direction of said cooling medium.
Inventors:
FUJII HIROFUMI
Application Number:
PCT/JP2013/005287
Publication Date:
April 17, 2014
Filing Date:
September 06, 2013
Export Citation:
Assignee:
KOBE STEEL LTD (JP)
International Classes:
C23C14/32
Foreign References:
| JPH06340968A | 1994-12-13 | |||
| JPH04301078A | 1992-10-23 | |||
| JPS5580366U | 1980-06-03 | |||
| JP3195492B2 | 2001-08-06 |
Other References:
See also references of EP 2907890A4
Attorney, Agent or Firm:
KOTANI, Etsuji et al. (JP)
Etsuji Kotani (JP)
Etsuji Kotani (JP)
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