PYROELECTRIC SENSOR ELEMENT AND PYROELECTRIC SENSOR USING SAME

WIPO Patent Application WO/2018/193824

A1

This pyroelectric sensor element is equipped with a substrate, a membrane provided on the top surface of the substrate, a ferroelectric film provided on the top surface of the membrane, and an upper-section electrode provided on the top surface of the ferroelectric film. The substrate has a first section and a second section which is thinner than is the first section. The membrane includes a lower-section electrode, and the membrane is provided with a plurality of through-holes that pass through the membrane from the bottom surface thereof to the top surface thereof in a location overlapping the second section of the substrate when viewed from the top.

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HORIE TOSHIAKI
YOSHIDA KAZUSHI
MORIKAWA AKIHIRO
TAKAYAMA RYOUICHI
ADACHI HIDEAKI
TANAKA YOSHIAKI
KORECHIKA TETSUHIRO

PCT/JP2018/014195

October 25, 2018

April 03, 2018

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PANASONIC IP MAN CO LTD (JP)

G01J1/02; H01L41/053; H01L41/09; H01L41/23; H01L41/25; H01L41/29

JP2015184151A	2015-10-22
US5583058A	1996-12-10
JP2014130056A	2014-07-10
US20120068072A1	2012-03-22
US20150179861A1	2015-06-25
JP2011179953A	2011-09-15
JP2014224810A	2014-12-04
JP2015206595A	2015-11-19

KAMATA Kenji et al. (JP)

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