Title:
PYROELECTRIC SENSOR
Document Type and Number:
WIPO Patent Application WO/2018/168151
Kind Code:
A1
Abstract:
A pyroelectric sensor having: an Si substrate; a layered part in which there are layered in the stated order on one surface of the Si substrate a heat-absorbing layer comprising an inorganic material, a lower electrode, a piezoelectric film, and an upper electrode; and an optical filter that is provided at a location on the other face of the Si substrate that faces the layered part, the optical filter selectively transmitting infrared light. The pyroelectric sensor senses infrared light that impinges on the layered part from the optical filter side via the Si substrate.
Inventors:
FUJII TAKAMICHI (JP)
Application Number:
PCT/JP2017/046480
Publication Date:
September 20, 2018
Filing Date:
December 25, 2017
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
G01J1/04; G01J1/02
Domestic Patent References:
| WO2012063642A1 | 2012-05-18 | |||
| WO2011125754A1 | 2011-10-13 |
Foreign References:
| JPS61226623A | 1986-10-08 | |||
| JPH06120570A | 1994-04-28 | |||
| JP2015507739A | 2015-03-12 | |||
| JP2002124708A | 2002-04-26 | |||
| JP2001304973A | 2001-10-31 | |||
| JPH075036A | 1995-01-10 | |||
| US5583058A | 1996-12-10 | |||
| JP2006317232A | 2006-11-24 |
Other References:
See also references of EP 3598088A4
Attorney, Agent or Firm:
TAIYO, NAKAJIMA & KATO (JP)
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