Title:
QUADRUPOLE MASS SPECTROMETER AND RESIDUAL GAS ANALYSIS METHOD
Document Type and Number:
WIPO Patent Application WO/2022/123895
Kind Code:
A1
Abstract:
The present invention is for reducing temperature influence caused by a transformer, in a quadrupole mass spectrometer. The present invention comprises: an ionization unit (21) for ionizing a sample; a quadrupole unit (23) having two sets of counter electrodes (23P) that selectively pass ions generated by the ionization unit (21); a voltage applying unit (32) for applying, to each of the two sets of counter electrodes (23P), voltage obtained by superimposing DC voltage U and high frequency voltage Vcosωt; and an ion detection unit (24) for detecting ions having passed through the quadrupole unit (23). The voltage applying unit (32) has a transformer (4) for transforming the high frequency voltage Vcosωt. The transformer (4) is formed by winding a primary winding (42) and a secondary winding (43) around a toroidal core (41). The primary winding (42) is formed of a plate-like metallic conductor.
Inventors:
TAKAKURA HIROSHI (JP)
Application Number:
PCT/JP2021/037836
Publication Date:
June 16, 2022
Filing Date:
October 13, 2021
Export Citation:
Assignee:
HORIBA STEC CO LTD (JP)
International Classes:
H01J49/02; H01J49/42
Domestic Patent References:
| WO2020178556A1 | 2020-09-10 |
Foreign References:
| JP2014146525A | 2014-08-14 | |||
| JP2005050689A | 2005-02-24 | |||
| JP2018060886A | 2018-04-12 | |||
| JPH07192945A | 1995-07-28 | |||
| US20030173524A1 | 2003-09-18 | |||
| US20060016981A1 | 2006-01-26 |
Attorney, Agent or Firm:
NISHIMURA, Ryuhei (JP)
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