QUANTUM DEVICE - MATSUSHITA ELECTRIC WORKS, LTD.

Title:

QUANTUM DEVICE

Document Type and Number:

WIPO Patent Application WO/2003/077320

Kind Code:

A1

Abstract:

An electron source element (10a) is formed on one front surface side of an insulating substrate (1) in an electron source (10). The electron source element (10a) comprises a downside electrode (2), a composite nano-crystal layer (6) and a surface electrode (7). The composite nano-crystal layer (6) includes a plurality of grains (51) that are polycrystalline silicons, thin silicon oxide films (52) each formed on the surface of each grain (51), a large number of nano-crystal silicons (63) intervened between adjacent grains (51), and a large number of silicon oxide films (64) each formed on the surface of each nano-crystal silicon (63) and being an insulation film having a film thickness smaller than the crystal grain size of the nano-crystal silicon (63). The surface electrode (7) comprises a carbon thin film (7a) laminated in contact with the composite nano-crystal layer (6), and a metal thin film (7b) laid on the carbon thin film (7a).

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Inventors:

Komoda, Takuya c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Koshida, Nobuyoshi (3-12-8, Midori-cho Koganei-shi, Tokyo, 184-0003, JP)
Ichihara, Tsutomu c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)

Application Number:

PCT/JP2003/002688

Publication Date:

September 18, 2003

Filing Date:

March 07, 2003

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC WORKS, LTD. (1048, Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Komoda, Takuya c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)
Koshida, Nobuyoshi (3-12-8, Midori-cho Koganei-shi, Tokyo, 184-0003, JP)
Ichihara, Tsutomu c/o MATSUSHITA ELECTRIC WORKS (LTD. 1048 Oaza-Kadoma Kadoma-shi, Osaka, 571-8686, JP)

International Classes:

C09K11/59; H01J1/312; H01J9/02; (IPC1-7): H01L29/06; H01L33/00; H01J1/312; H01J9/02

Attorney, Agent or Firm:

Aoyama, Tamotsu (Aoyama & Partners IMP Building, 3-7 Shiromi 1-chome Chuo-k, Osaka-shi Osaka, 540-0001, JP)

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