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Title:
QUARTZ BOAT CONVEYING MECHANISM FOR USE IN DIFFUSION FURNACE
Document Type and Number:
WIPO Patent Application WO/2018/036487
Kind Code:
A1
Abstract:
A quartz boat conveying mechanism for use in a diffusion furnace comprises a vertical column (1) fixed at one side in a diffusion furnace (9), a boat pushing mechanism (2) fixed at the other side in the diffusion furnace, and a lateral boat-discharging mechanism (6) fixed at the bottom of the diffusion furnace. A plurality of temporary storage areas (3) are fixed at intervals on the column from top to bottom, an SiC paddle (4) horizontally extends from the boat pushing mechanism, an elevator channel area (5) is provided between the SiC paddle and the temporary storage areas, and a manipulator (7) moving up and down along the column is further provided on the column, a position at which the lateral boat-discharging mechanism (6) is fixed on the bottom of the diffusion furnace (9) being located directly below the temporary storage areas (3). Owing to the quartz boat conveying mechanism in the diffusion furnace, when a position at which the SiC paddle (4) picks up and places the boat is relatively low, the manipulator (7), after grasping the quartz boat (8) on the SiC paddle (4) for transfer to the elevator channel area (5), will not collide with a quartz boat (8) being transferred on the lateral boat-discharging mechanism (6).

Inventors:
XIAO, Yuenan (Building D Digital Silicon Valley, 89# Hengping Road, Henggang Street, Longgang Distric, Shenzhen Guangdong 0, 518000, CN)
ZHANG, Yong (Building D Digital Silicon Valley, 89# Hengping Road Henggang Street, Longgang Distric, Shenzhen Guangdong 0, 518000, CN)
Application Number:
CN2017/098525
Publication Date:
March 01, 2018
Filing Date:
August 22, 2017
Export Citation:
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Assignee:
S.C NEW ENERGY TECHNOLOGY CORPORATION (Building D Digital Silicon Valley, 89# Hengping Road Henggang Street, Longgang Distric, Shenzhen Guangdong 0, 518000, CN)
International Classes:
H01L21/677; F27D5/00; H01L21/68; H01L31/18
Foreign References:
CN106128990A2016-11-16
CN206076214U2017-04-05
CN205050814U2016-02-24
CN201778110U2011-03-30
CN205303432U2016-06-08
CN103681420A2014-03-26
US4493606A1985-01-15
Attorney, Agent or Firm:
SHENZHEN KANGHONG INTELLECTUAL PROPERTY AGENT CO., LTD (6C1 Building A, ZhongYin BuildingNo.5015, CaiTian Rd., Futian Distric, Shenzhen Guangdong 6, 518026, CN)
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