Title:
QUARTZ CRYSTAL RESONATOR AND PROCESSING METHOD THEREFOR, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/183491
Kind Code:
A1
Abstract:
Provided are a quartz crystal resonator (501), which can both satisfy the requirement of high resonant frequency, and satisfy the requirements of stability and reliability for resistance to external stress and resistance to mechanical shock, and a processing method therefor, and an electronic device. The quartz crystal resonator (501) comprises, from bottom to top, a substrate (300), a piezoelectric stack structure, a mechanical reinforcement structure (200) and a cap structure (406). The piezoelectric stack structure and the mechanical reinforcement structure (200) are connected to each other at a first abutment position, and the piezoelectric stack structure and the substrate (300) are connected to each other at a second abutment position. The first abutment position is located in a non-resonant active region of a device, and the first abutment position is located above the second abutment position.
Inventors:
ZHANG MENGLUN (CN)
PANG WEI (CN)
PANG WEI (CN)
Application Number:
PCT/CN2021/079334
Publication Date:
September 09, 2022
Filing Date:
March 05, 2021
Export Citation:
Assignee:
UNIV TIANJIN (CN)
International Classes:
H02N2/18; H01L41/312; H03H9/19
Foreign References:
| CN111371424A | 2020-07-03 | |||
| CN206542385U | 2017-10-03 | |||
| JP2010057081A | 2010-03-11 | |||
| JP2017098888A | 2017-06-01 | |||
| US20050070045A1 | 2005-03-31 |
Other References:
LIU ZIFENG;LIANG JI;ZHANG MENGLUN: "A Film Bulk Acoustic Liquid Concentration Sensor Integrated with Microchannel", NANOTECHNOLOGY AND PRECISION ENGINEERING, vol. 15, no. 6, 15 November 2017 (2017-11-15), pages 460 - 465, XP055964168, ISSN: 1672-6030, DOI: 10.13494/j.npe.20160102
Attorney, Agent or Firm:
CHINA SMART INTELLECTUAL PROPERTY LTD. (CN)
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