Title:
QUARTZ DEVICE AND QUARTZ DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2005/125006
Kind Code:
A1
Abstract:
It is possible to provide a quartz device having a stable oscillation characteristic and a high reliability. The quartz device includes a first main surface having a part of a basic part and a part of an oscillation leg within a single plane and a second main surface having the other part of the basic part and the other part of the oscillation leg within a single plane. The first main surface and the second main surface are formed on a piece of quartz. The first main surface has an external shape which is different from an external shape of the second main surface. The shapes of the first main surface and the second main surface are formed by etching the quartz substrate by utilizing mask layer patterns formed by performing exposure using different mask patterns.
Inventors:
IKEDA TOMOO (JP)
Application Number:
PCT/JP2005/010528
Publication Date:
December 29, 2005
Filing Date:
June 02, 2005
Export Citation:
Assignee:
CITIZEN WATCH CO LTD (JP)
IKEDA TOMOO (JP)
IKEDA TOMOO (JP)
International Classes:
H01L41/09; H01L41/18; H01L41/22; H01L41/332; H03H3/02; H03H9/19; H03H9/21; H03H9/215; (IPC1-7): H03H9/215; H03H3/02; H03H9/19
Foreign References:
| JP2005167992A | 2005-06-23 | |||
| JP2004072609A | 2004-03-04 | |||
| JPS5983412A | 1984-05-14 |
Attorney, Agent or Firm:
Aoki, Atsushi (ISHIDA & ASSOCIATES Toranomon 37 Mori
Bldg., 5-1, Toranomon 3-chome, Minato-k, Tokyo 23, JP)
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