QUARTZ GLASS CRUCIBLE AND METHOD OF MANUFACTURING SAME

Title:

QUARTZ GLASS CRUCIBLE AND METHOD OF MANUFACTURING SAME

Document Type and Number:

WIPO Patent Application WO/2019/193851

Kind Code:

A1

Abstract:

The present invention is a quartz glass crucible comprising a bottom, a curved part, and a straight trunk. The crucible has an outer layer comprising bubble-containing opaque quartz glass, and an inner layer comprising transparent quartz glass. The outer layer is made from the same type or two or more different types of raw material powder, and comprises two or more sections differentiated by bubble content density, wherein, defining da (pcs/mm3) as the bubble content density of a section a, among two adjacent sections of the outer layer, having the greater bubble content density, and db (pcs/mm3) as the bubble content density of a section b having the smaller bubble content density, the bubble content density difference D = (da – db)/db between the two adjacent sections is at least 10%. As a result, it is possible to impart different functions to different sections of the outer layer of the quartz glass crucible.

Inventors:

BABA YUJI (JP)

Application Number:

PCT/JP2019/005945

Publication Date:

October 10, 2019

Filing Date:

February 19, 2019

Export Citation:

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Assignee:

SHIN ETSU QUARTZ PROD CO LTD (JP)

International Classes:

C30B29/06; C03B20/00; C30B15/10

Domestic Patent References:

WO2011030657A1

2011-03-17

Foreign References:

JP2011073925A	2011-04-14
JP2012116716A	2012-06-21
JP2010155765A	2010-07-15
JP2018039702A	2018-03-15
JP2010275151A	2010-12-09
JP2008169106A	2008-07-24
JP2010241623A	2010-10-28
JP2010275151A	2010-12-09

Other References: