Title:
QUARTZ GLASS CRUCIBLE FOR PULLING UP MONOCRYSTALLINE SILICON INGOT
Document Type and Number:
WIPO Patent Application WO/2023/204146
Kind Code:
A1
Abstract:
The present invention is a quartz glass crucible for pulling up a monocrystalline silicon ingot, the quartz glass crucible having a crucible shape comprising a straight torso section, a rounded section, and a bottom section and having an outer layer formed from an opaque quartz glass containing air bubbles, and an inner layer formed from a transparent quartz glass and having a wall thickness of 1.5 mm or greater. At a position 1 mm from an inner surface of the quartz glass crucible, the concentration of Na is less than 5 mass ppb, the concentration of K is less than 5 mass ppb, and the concentration of Li is less than 100 mass ppb. Further, in the wall thickness direction of the bottom section and the rounded section, the average concentration of Na is less than 10 mass ppb, the average concentration of K is less than 50 mass ppb, and the average concentration of Li is less than 180 mass ppb in the outer layer. Through such a configuration, a quartz glass crucible for pulling up a monocrystalline ingot is provided by which the occurrence of pinholes in the pulled up monocrystalline silicon ingot can be suppressed.
Inventors:
ISHIHARA YU (JP)
Application Number:
PCT/JP2023/015114
Publication Date:
October 26, 2023
Filing Date:
April 14, 2023
Export Citation:
Assignee:
SHIN ETSU QUARTZ PROD CO LTD (JP)
International Classes:
C30B29/06; C03B20/00; C30B15/10
Domestic Patent References:
| WO2010137221A1 | 2010-12-02 |
Foreign References:
| JP2019119621A | 2019-07-22 | |||
| JP2010111524A | 2010-05-20 | |||
| JP2003095678A | 2003-04-03 | |||
| JP2012136379A | 2012-07-19 | |||
| JP2020100515A | 2020-07-02 |
Attorney, Agent or Firm:
YOSHIMIYA Mikio et al. (JP)
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