Title:
QUARTZ OSCILLATING ELEMENT MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2020/203144
Kind Code:
A1
Abstract:
The present invention suppresses the occurrence of a burr remaining on a quartz oscillating element. This quartz oscillating element manufacturing method includes a step S in which a quartz piece 130, a crosspiece section 110, and a support section 120 that supports the quartz piece 130 on the crosspiece section 110 are formed by photoetching in an AT cut quartz substrate 101, which has been cut out such that the crystal axes of the quartz serve as an X axis, a Y axis, and a Z axis, the results of rotating the Y axis and the Z axis by a prescribed angle in a counterclockwise direction around the X axis serve as a Y' axis and a Z' axis, and surfaces that are parallel to a plane including the Z' axis and the X axis serve as main surfaces on the positive direction side and the negative direction side of the Y' axis. In this forming step, when a main surface is viewed in planar view, bottomed grooves 140A, 140B that are along a boundary line between the support section 120 and the quartz piece 130 are formed in the support section 120, and these bottomed grooves 140A, 140B are positioned on the Z' axis negative direction side of the main surface on the Y' axis positive direction side, and/or on the Z' axis positive direction side of the main surface on the Y' axis negative direction side.
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Inventors:
KIZU TORU (JP)
HIRAKA AKIHIRO (JP)
OOI YUUKI (JP)
KAMADA TAKESHI (JP)
KUMANO HIROSHI (JP)
HIRAKA AKIHIRO (JP)
OOI YUUKI (JP)
KAMADA TAKESHI (JP)
KUMANO HIROSHI (JP)
Application Number:
PCT/JP2020/010832
Publication Date:
October 08, 2020
Filing Date:
March 12, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO (JP)
International Classes:
H03H3/02; H03H9/19
Foreign References:
| JP2010178320A | 2010-08-12 | |||
| JP2007142526A | 2007-06-07 | |||
| JP2006186847A | 2006-07-13 |
Attorney, Agent or Firm:
INABA, Yoshiyuki et al. (JP)
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