Title:
QUARTZ RESONATOR HAVING SANDWICH STRUCTURE FORMED BY DOUBLE BASE PLATES AND PIEZOELECTRIC LAYER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2024/027737
Kind Code:
A1
Abstract:
The present invention relates to a quartz resonator, comprising a bottom electrode, a top electrode and a quartz piezoelectric layer, the quartz piezoelectric layer having an inverted highly-protruded structure comprising bosses; a packaging structure, comprising a first packaging substrate, a second packaging substrate and a bonding sealing layer, the bonding sealing layer comprising a piezoelectric layer packaging portion, the piezoelectric layer packaging portion being a part of the quartz piezoelectric layer, and the piezoelectric layer packaging portion comprising the bosses. The first packaging substrate and the second packaging substrate are respectively bonded to the bosses on the two sides of the quartz piezoelectric layer so as to form a sandwich structure comprising the first packaging substrate, the quartz piezoelectric layer and the second packaging substrate. The present invention also relates to an electronic device.
Inventors:
PANG WEI (CN)
ZHANG MENGLUN (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2023/110651
Publication Date:
February 08, 2024
Filing Date:
August 02, 2023
Export Citation:
Assignee:
UNIV TIANJIN (CN)
International Classes:
H03H9/05
Foreign References:
| JP2009260845A | 2009-11-05 | |||
| JP2010206322A | 2010-09-16 | |||
| JP2010130400A | 2010-06-10 | |||
| CN114696773A | 2022-07-01 |
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
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