Title:
QUARTZ TUBE CLEANING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2019/172486
Kind Code:
A1
Abstract:
The present invention relates to a quartz tube cleaning apparatus whereby the surface of a quartz tube is cleaned with a microbubble-mixed cleaning solution, thereby enabling cleaning efficiency and cleaning time reduction, the quartz tube cleaning apparatus, according to one embodiment of the present invention, comprising: a cleaning solution storage tank in which a cleaning solution is stored; a first flow channel in which the cleaning solution stored in the cleaning solution storage tank flows; an air supply part which supplies air to the cleaning solution flowing in the first flow channel and mixes the air in the cleaning solution; a supply pump which pumps the air-mixed cleaning solution having air mixed therein by the air supply part; and a microbubble generation part which generates a microbubble-mixed cleaning solution having microbubbles mixed in the cleaning solution by converting, into microbubbles, the air included in the air-mixed cleaning solution supplied from the supply pump, returns at least one portion of the generated microbubble-mixed cleaning solution to the cleaning solution storage tank, and supplies at least one portion of the generated microbubble-mixed cleaning solution to a cleaning module where a quartz tube is disposed.
Inventors:
HWANG WOO-CHUL (KR)
Application Number:
PCT/KR2018/007455
Publication Date:
September 12, 2019
Filing Date:
July 02, 2018
Export Citation:
Assignee:
ECOSET CO LTD (KR)
International Classes:
C02F1/32; B08B1/00
Foreign References:
| KR101463130B1 | 2014-11-21 | |||
| JP2018001143A | 2018-01-11 | |||
| KR20160044897A | 2016-04-26 | |||
| JP2000000447A | 2000-01-07 | |||
| KR20010097425A | 2001-11-08 |
Attorney, Agent or Firm:
CHEON JEE INTERNATIONAL PATENT & LAW FIRM (KR)
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